According to the different measurement objects, precision instruments can be divided into the following categories:
① Geometric precision instruments
It mainly includes precision instruments for detecting various geometric quantities, such as vertical angle measuring instruments, laser interferometers, theodolites, coordinate measuring machines, roundness meters, profilometers, and scanning tunneling microscopes.
② Thermal precision instruments
It mainly includes precision instruments for temperature, humidity, pressure, and flow detection, such as various barometers, vacuum gauges, multi wavelength temperature measuring instruments, flow meters, and altimeters.
③ Mechanical precision instruments
It mainly includes various force measuring instruments, strain gauges, acceleration and velocity measuring instruments, torque measuring instruments, vibration measuring instruments, universal material testing machines, and Brinell hardness testers.
④ Time frequency precision instrument
Mainly including various timing instruments and meters, atomic clocks, time-frequency measuring instruments, etc.
⑤ Electromagnetic precision instrument
Mainly used for measuring various electrical and magnetic quantities, such as ammeters, voltmeters, power meters, resistance measuring instruments, capacitance measuring instruments, electrostatic meters, and magnetic parameter measuring instruments.
⑥ Wireless precision instrument
It mainly includes oscilloscopes, signal generators, phase measuring instruments, spectrum analyzers, and dynamic signal analyzers.
⑦ Optical and Acoustic Precision Instruments
It mainly includes spectrometers, photometers, colorimeters, laser parameter measuring instruments, optical transfer function measuring instruments, noise measuring instruments, and sonar measuring instruments.
⑧ Ionizing radiation precision instrument
It mainly includes various radioactive, nuclide metrology, X-ray and λ radiation metrology instruments, etc.